sol - gel method using the manufacturing method SBT ferroelectrics thin film

摘要

this invention is a method of sol - gel SrBi2Ta2O ferroelectrics film 9 on the manufacturing method. according to this invention SrBi2Ta2O ferroelectrics film 9 of the manufacturing method, strontium, strontium precursor. the use of the solvent, the amount of seed science. to use the da precursor, coal, coal for the use of thallium in ub4dcub97c solvent, 2 - the a in the the use of the game, 20 with the precursor, the twenty six with ethyl 2 - the use of the solvent, 2 - ethyl six wing of the seed, use more convenient, the quality of the thin film to make the repeated record ub530ub978 ferroelectrics the film's fatigue and reduce the can.