Nonlinearity reduction Electrostatic fine actuator for head drive of hard disk drive

摘要

The present invention relates to an electrostatic microactuator for driving a head of a hard disk drive, characterized in that the stator is separately designed so that a control voltage can be applied, and the shifter is moved to a center shaft fixing or a biaxial fixing, This method has the effect of linear control because it has a structure that can apply the technique.