Nonlinearity reduction Electrostatic fine actuator for head drive of hard disk drive

摘要

The present invention relates to an electrostatic microactuator for driving a head of a non-linearity-reduced hard disk drive, wherein the stator is divided into a plurality of groups between left and right frames so that a control voltage can be applied, The force is generated due to the difference between the force generated when the left and right sides are moved and the force generated when the center is moved. Therefore, it is possible to reduce the nonlinearity And at the same time, since the left and right movement of the mover and the movement of the center are opposite to each other according to the support of the multi-point of the head mounting board, a force is generated as much as the difference of the forces of both do.