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Picker for transporting perforated panel in clean room and how to use picker

机译:在无尘室中运输多孔板的捡拾器以及如何使用捡拾器

摘要

The present invention relates to a method of using a picker and a picker for transporting a perforated panel in a clean room to prevent generation of particles and to facilitate movement when the perforated panel is moved in a clean space.;A picker for transporting a punched panel of a clean room according to the present invention is a picker for transporting a punched panel of a clean room for holding the panel so as to easily move the punched panel, the rod having one end inserted into the drilling tool, and one end of the picker Is hinged to one end of the foldable, when inserted into the drilling tool, the folding foldable and the claw fold means for pulling the rod in the direction of the rod to expand the use of gravity so that the rod does not get caught in the drilling tool The method of using the perforated panel transfer picker of the present invention includes inserting one end of the rod into the perforation tool so that the hanger is unfolded by gravity, and after moving the panel, pulling the lever Step to fold and pull out the rod It is characterized by consisting of systems.;Therefore, it has the effect of preventing the particles generated during the movement of the panel to increase the yield of the wafer, and facilitate the gripping of the panel.
机译:本发明涉及一种使用拾取器和拾取器在无尘室中运输多孔板以防止颗粒的产生并且当多孔板在清洁空间中移动时便于移动的方法。本发明的无尘室用面板是一种拾取器,其用于搬运无尘室的冲孔面板以保持该面板,以便容易地移动该冲孔面板,该杆的一端插入钻孔工具中,而一端捡拾器铰接在可折叠的一端,当插入到钻孔工具中时,可折叠的可折叠和爪折叠装置用于沿杆的方向拉动杆以扩大重力的使用,从而杆不会被卡住在钻孔工具中使用本发明的多孔板转移拾取器的方法包括将杆的一端插入穿孔工具中,以使吊架在重力作用下展开,然后移动面板,拉动杆折叠和拉出杆的步骤它的特征在于由系统组成。因此,它具有防止在面板移动过程中产生的颗粒的作用,从而提高了晶圆的产量,并有助于面板的夹紧力。

著录项

  • 公开/公告号KR19990049104A

    专利类型

  • 公开/公告日1999-07-05

    原文格式PDF

  • 申请/专利权人 윤종용;

    申请/专利号KR19970067955

  • 发明设计人 황태진;최재흥;임기환;류재준;

    申请日1997-12-11

  • 分类号H01L21/00;

  • 国家 KR

  • 入库时间 2022-08-22 02:17:05

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