Rotary Optical Probe for Plasma Density Distribution Measurement

摘要

The present invention relates to a rotatable optical probe that enables the spatial distribution of plasma density to be determined.;The rotatable optical probe of the present invention includes an optical probe head which collects parallel optical signals at a plasma measurement position and transmits them in a horizontal direction, and an optical probe body that focuses optical signals parallel in a horizontal direction transmitted from the optical probe head. And an optical probe socket for transmitting the optical signal focused at the optical probe body to the spectrometer, and a driving motor for rotating and rotating the rotary optical probe in the horizontal direction.