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APPARATUS FOR PULLING OXIDES SINGLE CRYSTAL CAPABLE OF INCREASING A PRECISION OF LOAD CELL
APPARATUS FOR PULLING OXIDES SINGLE CRYSTAL CAPABLE OF INCREASING A PRECISION OF LOAD CELL
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机译:用于拉动氧化物以增加载荷盒精度的装置
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摘要
The present invention is to remove the rotational motor required for the rotation of the crystal in the load cell to be fixed to the feed table for raising the crystal so that the load cell does not apply the load of the motor by reducing the capacity of the load cell by the weight of the rotating motor, the ratio of the load cell An object of the present invention is to provide an oxide single crystal growing apparatus capable of improving precision.;In particular, according to the present invention, the vibration and force instability generated during the rotational movement of the rotary motor in a state in which the rotating motor and the load cell are separated, the upper and lower sliding point contact type couple so that only the rotational movement can be transmitted without being transmitted to the load cell. Use a ring.;The device according to the present invention is designed to transmit rotational motion in a state in which the crystal rotation motor is separated from the load cell, so that a small capacity load cell can be used, and the vibration generated from the rotation of the motor is not transmitted to the load cell. The accuracy of the load cell can be improved.
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