首页> 外国专利> APPARATUS FOR PULLING OXIDES SINGLE CRYSTAL CAPABLE OF INCREASING A PRECISION OF LOAD CELL

APPARATUS FOR PULLING OXIDES SINGLE CRYSTAL CAPABLE OF INCREASING A PRECISION OF LOAD CELL

机译:用于拉动氧化物以增加载荷盒精度的装置

摘要

The present invention is to remove the rotational motor required for the rotation of the crystal in the load cell to be fixed to the feed table for raising the crystal so that the load cell does not apply the load of the motor by reducing the capacity of the load cell by the weight of the rotating motor, the ratio of the load cell An object of the present invention is to provide an oxide single crystal growing apparatus capable of improving precision.;In particular, according to the present invention, the vibration and force instability generated during the rotational movement of the rotary motor in a state in which the rotating motor and the load cell are separated, the upper and lower sliding point contact type couple so that only the rotational movement can be transmitted without being transmitted to the load cell. Use a ring.;The device according to the present invention is designed to transmit rotational motion in a state in which the crystal rotation motor is separated from the load cell, so that a small capacity load cell can be used, and the vibration generated from the rotation of the motor is not transmitted to the load cell. The accuracy of the load cell can be improved.
机译:本发明是为了消除称重传感器中的晶体旋转所需的旋转电动机,该旋转电动机被固定在用于提升晶体的进给台上,从而通过减小称重传感器的容量来使称重传感器不施加电动机的负载。本发明的目的是提供一种能够提高精度的氧化物单晶生长装置。特别是,根据本发明,其振动和力为零。在旋转电动机和测力传感器分离的状态下在旋转电动机的旋转运动过程中产生的不稳定性,上,下滑点接触式耦合,使得仅旋转运动可以被传递而不传递到测力传感器。使用环。根据本发明的装置被设计成在晶体旋转马达与称重传感器分离的状态下传递旋转运动,从而可以使用小容量的称重传感器,并且由振动产生。电机的旋转不会传递到称重传感器。可以提高称重传感器的精度。

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