TARGET FIXING PART OF PULSE LASER DEPOSITION SYSTEM USING COMPLEX ROTATION MOTION TRANSFERRING APPARATUS FOR HIGH VACUUM

摘要

The present invention relates to a target fixing part of a pulsed laser deposition apparatus using an ultra-high vacuum complex rotational motion transmission device. The present invention relates to a high vacuum composite rotary motion transmission device. The target attachment part, turntable, spindle, rotary motion distributor, rotary motion controller, and stainless steel support are the main components of the present invention in order to smoothly perform two functions independent of the rotation of the target. It is designed to facilitate large area deposition with a much simpler mechanical configuration than the device. Therefore, the present invention is very efficient that can be widely used not only in pulse type laser deposition equipment but also in various other equipment.