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TIP HAVING DUPLICATE STRUCTURE OF METAL AND DIAMOND PHASE CARBON WITH TRANSITION METAL AND MANUFACTURING METHOD THEREOF
TIP HAVING DUPLICATE STRUCTURE OF METAL AND DIAMOND PHASE CARBON WITH TRANSITION METAL AND MANUFACTURING METHOD THEREOF
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机译:具有过渡金属的金属和金刚石相碳的双重结构的尖端及其制造方法
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摘要
The proton metal-containing diamond phase carbon is used to effectively suppress the wear and destruction of the tip caused by the sputtering of the silicon tip due to the residual gas in the vacuum or the gas deviating from the bright body, and the oxidation. By providing a tip having a dual structure of and metal, the swamp exhibits electron emission characteristics even under low voltage.
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