Transfer wafer sagging prevention device of semiconductor manufacturing equipment

摘要

The present invention relates to a transfer wafer deflection prevention device of a semiconductor manufacturing equipment. Conventionally, wafers are frequently broken because there is no device for detecting and controlling the deflection of the wafer conveyed by the charger, which causes waste of wafers and inefficiency and reduced productivity. there was. Accordingly, the present invention provides a photo sensor which detects the deflection of the wafer by light blocking caused by the deflection of the wafer, which is installed in a manner of receiving light on the inner side of the front and rear surfaces of the charger for transporting a plurality of wafers from the cassette to the boat; By configuring the software interlock to stop the wafer transfer operation while generating an alarm as a detection signal of the photosensor, it is possible not only to prevent the wafer damage caused during wafer transfer due to the sag of the wafer, but also because of this. It will have the effect of improving work efficiency and productivity.