Narrow band excimer laser useful as a UV light source in industrial semiconductor device manufacture

摘要

Narrow band excimer laser optics include a fluoride component (7) having a cleavage plane approximately parallel to the laser beam incidence face and/or exit face. An Independent claim is also included for a narrow band excimer laser with a fluoride component (7) positioned such that its cleavage plane is approximately at right angles to the propagation direction of a laser beam (3) which passes through the component.