Coating device under vacuum in order to coat all the dimensions a substrate by rotation of the substrate in the flow of material

摘要

The device comprises a source of material (13), a door - substrate (6) in order to maintain the substrate (3) in front of the source (13) and a drive system (10, 11, 21) to rotate and move the substrate (3). The door - substrate (6) is a hollow part by three arms (7, 8, 9), the first (7) and the second arm (8) forming an obtuse angle (alpha), and the second and third arms (8 and 9) forming an elbow perpendicular, and the substrate (3) being maintained at the end of the third branch (9). The axis (1) of the first branch (7) intersects the central region of the substrate (3), the door - substrate (6) is driven in rotation and will -, - is about the axis (1) of the first branch (7), and the substrate (3) is integral in rotation a shaft (12) is articulated or flexible guided along the arms (7, 8, 9), and whose free end is connected to a motor (21).