VACUUM COATING DEVICE FOR COATING A SUBSTRATE BY ALL ROTATIONS BY ROTATING THE SUBSTRATE IN THE MATERIAL FLOW

摘要

P The device comprises a source of material (13), a substrate holder (6) to hold the substrate (3) in front of the source (13) and a drive (10, 11, 21) to rotate and move the substrate (3). The substrate holder (6) is a hollow part in three branches (7, 8, 9), the first (7) and the second branch (8) forming an obtuse angle (alpha), and the second and third branches (8 and 9) forming a perpendicular bend, and the substrate (3) being held at the end of the third branch (9). The axis (1) of the first branch (7) intersects the central region of the substrate (3), the substrate holder (6) is driven in rotation and back and forth around the axis (1) of the first branch (7), and the substrate (3) is integral in rotation with an articulated or flexible shaft (12) guided along the branches (7, 8, 9), and the free end of which is connected to a motor (21). /P