Three dimensional structured substrate producing device, has vacuum-coating equipment for coating substrate in vacuum chamber, and laser provided for processing substrate in vacuum chamber

摘要

The device has vacuum-coating equipment (2) for coating a substrate in a vacuum chamber. A laser is provided for processing the substrate in the vacuum chamber. The laser is provided within the chamber that serves for coating. The vacuum chamber has a passage for laser lights. Robot arms are provided within the vacuum chamber and transport the substrate from one position to another position.