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Method and apparatus for localized mechanothermal analysis combined with scanning probe microscopy
Method and apparatus for localized mechanothermal analysis combined with scanning probe microscopy
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机译:结合扫描探针显微镜进行局部机械热分析的方法和装置
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摘要
A system and method for performing localized mechanothermal analysis with scanning probe microscopy ("MASM") is disclosed. In a preferred embodiment an image of the surface or subsurface of a sample (104) is created. A localized region of the sample (104) is selected from the image. Using a scanning microscope (103), an active or passive thermal probe is positioned (108) at the selected region. A temperature ramp is applied to the localized region. In addition, a dynamic or modulated stress or strain is applied to the localized region. Force data resulting from the applied temperature and stress or strain is collected and processed to produce a graph or fingerprint of the dynamic mechanical and/or calorimetric properties of the selected localized region.
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