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Miniature pulsed vacuum arc plasma gun and apparatus for thin- film fabrication
Miniature pulsed vacuum arc plasma gun and apparatus for thin- film fabrication
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机译:微型脉冲真空电弧等离子体枪和用于薄膜制造的设备
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摘要
A miniature (dime-size in cross-section) vapor vacuum arc plasma gun is described for use in an apparatus to produce thin films. Any conductive material can be layered as a film on virtually any substrate. Because the entire apparatus can easily be contained in a small vacuum chamber, multiple dissimilar layers can be applied without risk of additional contamination. The invention has special applications in semiconductor manufacturing.
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