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Photoresist film for deep ultra violet and method for forming photoresist film pattern using the same
Photoresist film for deep ultra violet and method for forming photoresist film pattern using the same
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机译：用于深紫外线的光致抗蚀剂膜和使用该光致抗蚀剂膜形成光致抗蚀剂膜图案的方法
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摘要
A photoresist film superior in etch resistance and PED stability, as well as transmittance to deep UV, having a backbone of polymethylmethacrylate grafted with piperidine moiety of which the nitrogen atom acts as a base.
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