CVD method of depositing a plurality of polycrystalline diamond film layers

摘要

A CVD method of forming a diamond coated article is disclosed, which consists essentially of a substrate and a plurality of polycrystalline diamond film layers accumulatively coated thereon in a total thickness of at least 20 &mgr;m, wherein each of the polycrystalline diamond film layers (i) has a thickness of 6 to 13 &mgr;m, (ii) has an average crystallite size in the surface direction thereof of 3 to 7 &mgr;m, (iii) has (111) oriented diamond crystallites exposed on the surface thereof, and (iv) satisfies the relationship: I(N)/I(D) 0.2, wherein I(D) represents an intensity of diamond Raman peak in counts/sec appearing around 1333 cm.sup.-1 and I(N) represents a maximum intensity among non- diamond Raman peaks appearing between 1200 cm.sup.-1 and 1600 cm.sup.-1.