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Sample for transmission electron microscope analysis having no conductive material in the electron beam path, and its manufacturing method
Sample for transmission electron microscope analysis having no conductive material in the electron beam path, and its manufacturing method
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机译:在电子束路径中没有导电材料的用于透射电子显微镜分析的样品及其制造方法
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摘要
A method for manufacturing a transmission electron microscope analysis sample of a substrate containing an insulating body or an insulating sample includes the steps of: depositing a conductive material on the sample and then polishing the sample using a focused ion beam. The polishing step removes the conductive material from the analysis point of the sample, such that an electron projection and transmission path is formed through the sample at the analysis point. However, the conductive material is not removed from the remainder of the sample, not including the analysis point, thereby forming a ground path for any charges formed in the sample.
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