The Chisso reflow device and the Chisso reflow manner

摘要

PURPOSE: To replace air with nitrogen gas in a heating chamber when starting operation. ;CONSTITUTION: When starting operation, air in a heating chamber 1, is exhausted to a gas circulating circuit 14 to remove oxygen in the air by an oxygen remover 16 and then the air is circulated into the chamber 1. After the oxygen concentration has reached a primary target value, nitrogen gas is supplied from a nitrogen gas feed part 11 to the chamber 11 while removing oxygen by the oxygen remover 16 until the oxygen concentration reaches a final target value.;COPYRIGHT: (C)1994,JPO&Japio