OPTICAL TOMOGRAPHY BASED ON SPECTRUM INTERFERENCE AND OPTICAL SURFACE PROFILE MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To enable optical surface profile measurement and optical section image photographing to transparent, translucent and opaque objects, by using an interferometer analyzing the intensity of a light appearing by interference of a luminous flux from a measuring arm and a reference arm, with a spectroscope. ;SOLUTION: A light outputted from a light source 1 is divided into a measurement light 3 and a reference light 4 by a beam splitter 2. The measurement light 3 is turned toward a lens 6 by a rotary mirror 5 and converged in an object 7 to be measured. A reflected light returns to the beam splitter 2, and travels toward an interferometer outlet where a spectrophotometer constituted of a dispersion prism 3, a spectroscope 9 and a detection array 10 is installed. The spectrophotometer records the intensity of a light reflected from the whole irradiation body deep part at a light position X, with a function of wavelength excluding the reference light. By moving a reference mirror 11 along the optical axis with a piezoelectric adjusting unit 12, phase measurement is enabled while using discontinuous adjusting function of the reference mirror 11.;COPYRIGHT: (C)1999,JPO