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Microminiaturization twisted chianti lever for high sensitivity power detection
Microminiaturization twisted chianti lever for high sensitivity power detection
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机译:超小型扭曲的基安蒂杠杆,用于高灵敏度功率检测
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摘要
A torsional cantilever is microfabricated for reduced size to increase its resonance frequency, increase its scanning speed, and permit fabrication of large numbers in an array to provide parallel scanning. The cantilever may incorporate a tip for highly sensitive force detection. The device preferably includes a cantilever arm and a counterbalance mounted on opposite sides of a laterally extending torsional beam fixed at its outer ends. Sensors detect rotation of the cantilever arm and may provide control of sensor locator through a feedback loop.
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