FIELD EMISSION TYPE ELECTRON SOURCE AND ITS MANUFACTURE, AND PLANAR LIGHT-EMITTING DEVICE, DISPLAY DEVICE AND SOLID VACUUM DEVICE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive field emission type electron source which enables stable and efficient emission of electrons. ;SOLUTION: A rapidly heat-oxidized porous poly-silicon layer 6 is formed on the front face of an N-type silicon substrate 1 which is a conductive substrate, and a gold thin film 7 which is a metal thin film is formed on the rapidly heat-oxidized porous poly-silicon layer 6. An ohmic electrode 2 is formed on the rear face of the N-type silicon substrate 1. Voltage is impressed between the gold thin film 7 and the ohmic electrode 2 with the gold thin film 7 which is a positive electrode with respect to the N-type silicon substrate 1, thereby the electrons injected from the N-type silicon substrate 1 into the rapidly heat- oxidized porous poly-silicon layer 6 are emitted through the gold thin film 7.;COPYRIGHT: (C)1999,JPO