CARBON ATOM CLUSTER ION GENERATING DEVICE AND CARBON ATOM CLUSTER ION GENERATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a carbon atom cluster ion generating device with a reduced size and reduced power consumption generating carbon cluster ions in uniform size efficiently, and a carbon atom cluster ion generating method. ;SOLUTION: A carbon atom cluster ion source is set in a vacuum chamber 7, a heating device 1 carries a current to heat a carbon nanotube 2 after the vacuum chamber 7 is vacuumized, and carbon atoms comprising the carbon nanotube 2 are vaporized in cluster state in an electric field by adjusting an acceleration voltage +E1 and an extraction voltage -E2. The vaporized carbon atom clusters have already been ionized and are emitted into the vacuum. It has been confirmed that carbon atom cluster ions (particularly C20) in uniform size are generated efficiently and the generation of impurity ions other than carbon atom is restrained.;COPYRIGHT: (C)2000,JPO