PROBLEM TO BE SOLVED: To efficiently measure the film physical property of an optical recording medium by using a substrate having double refractivity without stopping a manufacturing line when a polarization analysis technology such as ellipsometry is employed. ;SOLUTION: In the manufacturing mode of an optical disk sample, an optical disk substrate 101 is inserted into a substrate inlet/outlet 102 with front and back sides reversed to that in the case of an optical disk manufacturing mode, and then a substrate carrier mechanism 105 carries this optical disk substrate 101 to a cathode 110 to form a reflecting layer on the optical disk substrate 101. Then, this optical disk substrate 101 is carried to a cathode 106, and an optical disk sample laminated with a thin film to be measured is manufactured.;COPYRIGHT: (C)2000,JPO
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