SEMICONDUCTOR DEVICE TESTER, TIMING GENERATOR, METHOD FOR TESTING SEMICONDUCTOR DEVICE, AND METHOD FOR GENERATING TIMING

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device tester provided with a timing generator the delay circuit of which is improved in accuracy by reducing the variation of a power supply current. ;SOLUTION: A timing generator 30 incorporates a variable delay circuit 52 which outputs a timing signal having a desired frequency by delaying a reference clock signal CLK2 by a desired period of time and a correcting means 60 which reduces the variation of a power supply current which occurs when the signal CLK2 is delayed. The correcting means 60 incorporates a complement delaying circuit 62, a dummy circuit 64, and a complementary system 68.;COPYRIGHT: (C)2000,JPO