IMAGE OPTIC SYSTEM USING SOLID IMMERSION LENS AS WELL AS OPTICAL DISK RECORDING AND REPRODUCING DEVICE AND MICROSCOPE USING THE IMAGE OPTIC SYSTEM

摘要

PROBLEM TO BE SOLVED: To obtain an image optic system having a solid immersion lens of an optimum size with respect to a visual field radius required from the standpoint of an optical aberration.;SOLUTION: This image optic system has an objective lens 5 and the solid immersion lens 1 disposed on its optical axis L. The solid immersion lens 1 is composed to have a planoconvex lens shape having a convex spherical lens face 1a having a prescribed radius R of curvature having the image forming point O on the optical axis of the objective lens 5 as the center of the curvature and a plane-shaped lens face 1b perpendicular to the optical axis of the objective lens 5 through the center of the curvature. The convex spherical lens face 1a is directed to the objective lens 5 side and the plane-shaped lens face 1b is disposed in extreme proximity to an image forming face 6. In addition, the diameter Φ of the solid immersion lens satisfies the following conditions 0.6n.NA2.r2.λ1≤Φ≤3.2n.NA2.r2.λ-1 (where, the units of lengths are all in millimeter) with respect to the numerical aperture NA of the image optic system, the refractive index (n) of the solid immersion lens, the required visual field radius (r) and the wavelength λ of the light to be used.;COPYRIGHT: (C)2000,JPO