AUTOMATIC DEFECT INFORMATION COLLECTION CONTROL METHOD AND RECORDING MEDIUM RECORDING AUTOMATIC DEFECT INFORMATION COLLECTION CONTROL PROGRAM

摘要

PROBLEM TO BE SOLVED: To make it possible to efficiently perform observation of a defect and a foreign matter by an electron microscope by permitting a detection method for automatically detect a singular point on the basis of inspection information to be arbitrarily changed. ;SOLUTION: A generation point of a defect or a foreign matter is specified by using an abnormal part detection device 1, a singular point is automatically detected by using an electron microscope 6 on the basis of inspection result information 2 such as a detection method of the abnormal part detection device 1 or defective foreign matter coordinates, and information on the detected singular point is observed and processed. An automatic detection method of the singular point is set by a singular point detection setting means 3. Detection of the singular point of defect information collection by a normal electron microscope discriminates the detection method by pattern information of an inspection point. These pieces of information are obvious before the inspection by the electron microscope By using this pattern information before the detection of the singular point, it is possible to omit movement of a reference point by a wafer where a pattern is not observed at the time of the singular point detection and the inspection of the singular point can be efficiently performed.;COPYRIGHT: (C)2000,JPO