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LIGHT CONDENSING AND HEATING APPARATUS AND LIGHT CONDENSING AND HEATING TYPE ZONE MELTING APPARATUS AS WELL AS SINGLE CRYSTAL AND HIGH-PURITY METAL PRODUCED BY THE SAME
LIGHT CONDENSING AND HEATING APPARATUS AND LIGHT CONDENSING AND HEATING TYPE ZONE MELTING APPARATUS AS WELL AS SINGLE CRYSTAL AND HIGH-PURITY METAL PRODUCED BY THE SAME
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机译:聚光加热装置,聚光加热型区域熔融装置以及由其制造的单晶和高纯金属
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摘要
PROBLEM TO BE SOLVED: To suppress the spread of a thermal distribution in the growth axis direction of a single crystal and to increase production per unit time without degrading the quality of the single crystal by providing the circumference at the main shaft of the inside of a spheroidal mirror with a shielding plate having a diaphragm mechanism and changing its aperture diameter for the single crystals of various kinds. ;SOLUTION: The disk-shaped shielding plate 17 having the diaphragm mechanism is mounted around the vertical main shaft of the spheroidal mirror 5. A highly heat resistant metal, such as molybdenum or stainless steel, is used for the material of the shielding plate 17. Three supporting rods 19 are mounted at the shielding plate 17. These supporting rods 19 are hooked at the mouth of a transparent barrier 13. The shielding plate 17 is provided with the diaphragm mechanism, by which the regulation of the heat distribution for the single crystals of various kinds is made possible. A knob for diaphragm regulation is introduced to the outside of the light condensing and heating apparatus along the inside surface of the transparent barrier 13 and the aperture diameter 18 is regulated by the diaphragm of the shielding plate 17. As a result, the single crystal growth may be stably executed by controlling the length of a melting zone.;COPYRIGHT: (C)2000,JPO
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