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Dual-band infrared sensing material array and focal plane array

机译:双波段红外传感材料阵列和焦平面阵列

摘要

A dual color focal plane array includes a sensing material array (SMA) backed by a readout multiplexer unit (RMU). The SMA includes two interleaved sets of pixels. Each pixel of the first set, sensitive only in a primary band, includes a QWIP backed by a grating. Each pixel of the second set, sensitive only in a secondary band, includes a QWIP in tandem with an intrinsic normal incidence detector but lacking a grating. The QWIPs with gratings detect in the primary band. The QWIPs without gratings are inactive. The intrinsic normal incidence detectors detect in the secondary band. The preferred intrinsic normal incidence detector is a PIN diode. The QWIPs and the intrinsic normal incidence detectors are deposited together epitaxially on a common substrate, and then the intrinsic normal incidence detectors are removed from the pixels of the first set by etching. Each pixel of the SMA is connected electrically to a cell of the RMU.
机译:双色焦平面阵列包括由读出多路复用器单元(RMU)支持的传感材料阵列(SMA)。 SMA包括两组交错的像素。第一组的每个像素仅在主频带中敏感,包括一个由光栅支持的QWIP。第二组的每个像素仅在次级频带中敏感,包括一个QWIP和一个固有的法向入射检测器,但缺少光栅。带有光栅的QWIP在主频带中进行检测。没有光栅的QWIP处于非活动状态。本征法向入射检测器在次级频带中进行检测。首选的固有法向入射检测器是PIN二极管。将QWIP和本征垂直入射检测器外延地沉积在同一基板上,然后通过蚀刻从第一组像素中去除本征垂直入射检测器。 SMA的每个像素电连接到RMU的单元。

著录项

  • 公开/公告号AU3505300A

    专利类型

  • 公开/公告日2000-10-04

    原文格式PDF

  • 申请/专利权人 SAGI-NAHOR LTD.;

    申请/专利号AU20000035053

  • 发明设计人

    申请日2000-02-29

  • 分类号H01L31/072;H01L31/109;H01L31/0328;H01L31/0336;

  • 国家 AU

  • 入库时间 2022-08-22 01:51:56

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