Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device

摘要

The shape of a reflecting surface (7XS) formed on a moving object (4) moving along a reference plane is measured by measuring one-dimensional shapes of the reflecting surface (7XS) along the extending direction of the reflecting surface (7XS) at a plurality of different positions in a direction perpendicular to the reference plane. At least one of the position and posture of the moving object (4) is accurately controlled on the basis of the shape information obtained in this manner, the two-dimensional position information of the moving object (4), and the tilt information of the reflecting surface (7XS).