SHAPE MEASURING METHOD AND SHAPE MEASURING DEVICE, POSITION CONTROL METHOD, STAGE DEVICE, EXPOSURE APPARATUS AND METHOD FOR PRODUCING EXPOSURE APPARATUS, AND DEVICE AND METHOD FOR MANUFACTURING DEVICE

摘要

The shape of a reflecting surface (7XS) provided on a moving object (4) moving along a reference plane is linearly measured in the direction where the reflecting surface (7XS) extends at different points on a line perpendicular to the reference plane to obtain the shape of the reflecting surface (7XS). At least one of the position and posture of the moving object (4) is precisely controlled on the basis of the shape information thus collected, information on the two-dimensional position of the moving object (4), and information on the tilt of the reflecting surface (7XS).