APPLICATION OF X-RAY OPTICS TO ENERGY DISPERSIVE SPECTROSCOPY

摘要

An x-ray optic (10) is employed in combination with an energy dispersive spectroscopy (EDS) detector (26) to enhance detection performance. Such a combination optic and detector may be employed in scanning electron microscope or environmental scanning electron microscope (ESEM) applications. The x-ray optic may be a grazing incidence optic (GIO) employed as a flux enhancing collimator for use with an EDS detector, used to perform electron beam microanalysis. It is found that the GIO in combination with an EDS provides substantial intensity gain for x-ray lines with energy below 1 keV. The GIO is also found to provide modest minimal spectral effects. The combination optic and detector is useful in applications employing broad beam excitation, such as ESEM or system using x-ray fluorescence, to spatially limit the x-rays of interest to those within the acceptance angle of the optic.