首页> 外国专利> MONOLITHIC INTEGRATION OF A DETECTION SYSTEM FOR NEAR-FIELD MICROSCOPY BASED ON OPTICAL FEEDBACK IN A VERTICAL CAVITY SURFACE EMITTING LASER

MONOLITHIC INTEGRATION OF A DETECTION SYSTEM FOR NEAR-FIELD MICROSCOPY BASED ON OPTICAL FEEDBACK IN A VERTICAL CAVITY SURFACE EMITTING LASER

机译:垂直腔激光发射中基于光学反馈的近场显微镜检测系统的单相积分

摘要

The invention concerns an optical device comprising a SNOM tip, a laser cavity, a photodetector, said SNOM tip, said laser cavity and said photodetector being monolithically assembled in one common structure, the laser cavity being a VCSEL laser. The photodetector is located either beneath the assembly consisting of the SNOM probe and the VCSEL laser, or between the SNOM tip and the VCSEL laser.
机译:本发明涉及一种光学装置,其包括SNOM尖端,激光腔,光电检测器,所述SNOM尖端,所述激光腔和所述光电检测器整体地组装在一个共同的结构中,所述激光腔是VCSEL激光器。光电探测器位于由SNOM探针和VCSEL激光器组成的组件下方,或者在SNOM尖端和VCSEL激光器之间。

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