A multi-degree-of-freedom table support unit, and a multi-degree-of-freedom table mechanism.

摘要

The present invention provides a multi-degree-of-freedom table support unit U, comprising a lengthwise and crosswise motion mechanism with two outer support plates integrally combined with an inner support plate held between them, and with bearings installed between the inner support plate and the respective outer support plates; a spherical bearing mechanism consisting of a spherical face formed in the inner support plate and a spherical body slidably engaged with the spherical face; a rod installed in an opening formed in at least either of the outer support plates, with its tip connected with the spherical body; and a straight motion bearing mechanism for back-and-forth movably supporting the rod. The present invention also provides a multi-degree-of-freedom table mechanism, in which support units with the above structure are used to support a stage on a support frame, so that the stage can be moved in X, Y and Z directions by driving the rods of the support units back and forth.