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Process of fabrication of semiconductor wafer boat and wafer boat
Process of fabrication of semiconductor wafer boat and wafer boat
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机译:半导体晶圆舟和晶圆舟的制造工艺
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摘要
Semiconductor wafer holder production involves diffusion welding and/or germanium soldering of mating surfaces of single crystal or polycrystalline silicon holder parts (7). An Independent claim is also included for a wafer holder produced by the above process.
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