High speed optical modulator integrated with passive optical waveguide with multiple quantum well structure, manufacturing method thereof, and optical modulation method using the same

摘要

The present invention relates to an optical modulator integrated with a passive optical waveguide of a multiple quantum well structure capable of forming a passive optical waveguide without a regrowth process in an electric field absorbing optical modulator, Provided is an optical modulator having a semiconductor layer of a well structure and capable of obtaining light modulation by applying a reverse voltage to a light absorption region and a forward voltage to a passive optical waveguide region, respectively. As a result, an optical modulator having a low capacitance and a sufficient length can be manufactured, and an anti-reflection thin film can be deposited on both ends of the optical modulator more easily, and a packaging process such as wire bonding can be performed easily.