MULTI QUANTUM WELL STRUCTURED PASSIVE OPTICAL WAVEGUIDE INTEGRATED VERY HIGH SPEED OPTICAL MODULATOR, MANUFACTURING METHOD THEREOF AND OPTICAL MODULATING METHOD USING THE SAME

摘要

Purpose: a ultrahigh speed optical modulator is arranged to prevent the degeneration of crystal defect therefore device by regrowth process without regrowth process using identical one its manufacturing method and optical modulating method by providing passive optical waveguide integrated optic modulator. Construction: a ultrahigh speed optical modulator includes the first coating in a semiconductor substrate, a multi-quantum pit structure light absorbing layer (11A) on a middle section of the first coating, passive optical waveguide (11B) on the first coating and in light absorbing layer two sides, the second coating (13) on light absorbing layer and passive optical waveguide, in an interface of light absorbing layer and an insulating layer (14) for passive optical waveguide, one electrode, it is used to apply the voltage on light absorbing layer and passive optical waveguide, anti-reflection layer near the first coating, passive optical waveguide and the second coating. Light absorbing layer and passive optical waveguide multi-quantum pit structure semiconductor layer having the same.