CYLINDER TYPE CAPACITOR HAVING HEMISPHERICAL GRAIN SILICON AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A cylinder type capacitor and a method for manufacturing the cylinder type capacitor are provided to enhance the capacitance of the capacitor by preventing the short caused by the contact between hemispherical grain silicon and a capacitor electrode. CONSTITUTION: A cylinder type capacitor comprises a lower electrode, a dielectric film and an upper electrode formed in a semiconductor substrate(100). The lower electrode is formed at an inner surface thereof with hemispherical grain silicon(124). The dielectric film consisting of a first nitride film(126), a second nitride film(132) and an oxide film(134) is formed in the lower electrode. In addition, the dielectric film consisting of a second nitride film(132) and an oxide film(134) is formed at an outer portion of the lower electrode.