PSM An apparatus for measuring phase of a phase shift mask and method for measuring the phase using the same

摘要

A PSM phase measuring apparatus and a method of measuring a phase of a PSM using the same are disclosed.;The interferometer consists of two glass layers with silver coating on one side. Then, the phase of the PSM to be measured in parallel with the glass layer is measured between the two glass layers.;Therefore, the cost of constructing the PSM phase measuring apparatus can be very low compared to the prior art, and the phase of the PSM can be accurately measured.