MICRO STRUCTURE FOR OSCILLATION AND METHOD OF CONTROLLING RESONANT FREQUENCY AND THE SAME AND MICROACTUATOR AND MICRO GYROSCOPE USING THE SAME

摘要

PURPOSE: A micro vibrating structure, a method of controlling the resonant frequency of the vibrating structure and a micro actuator using the structure are provided by which an inertial object can be driven in parallel according to electrostatic force parallel with a substrate, caused by ununiformity of electric field, and the resonant frequency of the inertial object can be increased when applied voltage is raised. CONSTITUTION: A micro vibrating structure includes a substrate(50), an inertial object(53) placed above the substrate having a predetermined distance between the substrate and the inertial object, and an elastic member connected to the inertial object. The vibrating structure further has a support(51) for supporting the elastic member with respect to the substrate, a moving electrode(54) attached to the inertial object and projected by a predetermined length, and a fixed electrode(56) formed on the substrate, being separated from the moving electrode by a predetermined distance. The micro vibrating structure also has one common electrode(55) formed on the substrate, having a predetermined distance from the front ends of the fixing electrode and moving electrode.