Microactuator and method for controlling resonant frequency thereof

摘要

A microactuator is provided. The microactuator includes a substrate, a support fixed to an upper surface of the substrate, an elastic member connected to the support, an inertial member connected to the elastic member and spaced apart from the upper surface of the substrate by a predetermined distance, to be vibrated in a first direction parallel to the substrate, moving electrodes protruding from both sides of the inertial member in a second direction perpendicular to the first direction, fixed electrodes fixed on the substrate, facing the moving electrodes, spaced apart from the moving electrodes by a predetermined distance, and supplying an electrostatic repulsive force in the first direction to the moving electrodes when an electric potential is applied, common electrodes fixed on the substrate in the first direction, spaced apart from the moving electrodes and the fixed electrodes by a predetermined distance, and a power supply applying an electric potential to the moving electrodes, the fixed electrodes and the common electrodes.