PURPOSE: An electrostatic microactuator is provided to reduce generation of a vertical floatation between a stator finger and a moving finger, and to reduce a nonlinearity. CONSTITUTION: Fingers(32) are fixed on a stator(30) for alternately receiving positive and negative voltages. A moving body(40) has plural comb shaped bodies(42). Herein, the comb shaped bodies include fingers(44). The number of the fingers on the comb shaped bodies is over number of the fingers on the stator by one. Power is supplied to springs positioned at both ends of the moving body, the stator, and the moving body. In case of change in a transverse gap, a transverse force is reduced for reducing nonlinear element of electrostatic power is reduced.
展开▼
