An apparatus for the rapid measurement angle-dependent diffraction effects on finely structured surfaces

摘要

Proposed is a device for measuring angle-dependent diffraction effects, consisting of a coherent radiation source (1), a device for deflection of the coherent radiation (2) in different directions, a spherical or aspherical mirror or mirror segments, which are arranged in such a way that they correspond to that of a spherical or aspherical mirror (3), a detector unit (4) for measuring the intensity of the radiation diffracted at a sample, characterized in that the deflected in different directions of radiation is reflected from the mirror arrangement in such a way that the coherent jet sequentially in time behind one another with different angles of incidence onto the sample is deflected. Dollars a of the angle of incidence of the measurement beam is changed continuously or in small steps. The intensities of the direct reflection (zeroth crook order) as well as the possibly occurring higher used are measured. The evaluation of the intensity curves as a function of the varied angle of incidence permits conclusions with respect to the shape and material of the examined periodic structures.