首页> 外国专利> Thin film especially for a thin film solar cell is produced by removing a buried sacrificial layer to leave a starting body layer on an applied substrate

Thin film especially for a thin film solar cell is produced by removing a buried sacrificial layer to leave a starting body layer on an applied substrate

机译:通过去除掩埋的牺牲层以在涂覆的基底上留下起始主体层来生产特别是用于薄膜太阳能电池的薄膜

摘要

Thin film production involves removing a buried sacrificial layer (11) to leave a starting body layer (15) on an applied substrate (14). A thin film is produced on a support substrate (14) of a starting body by producing, within the starting body, a buried sacrificial layer (11) which separates a layer (15) from the remainder (10) of the starting body, applying the support substrate (14) on the layer (15), and then removing the sacrificial layer (11) so that the substrate-supported layer (15) forms the thin film.
机译:薄膜生产涉及去除掩埋的牺牲层(11),以在涂覆的衬底(14)上留下起始主体层(15)。通过在初始主体内产生掩埋的牺牲层(11),在初始主体的支撑基板(14)上形成薄膜,该牺牲层将层(15)与初始主体的其余部分(10)分开,并施加在层(15)上的支撑衬底(14)上,然后去除牺牲层(11),使得衬底支撑层(15)形成薄膜。

著录项

  • 公开/公告号DE19936941A1

    专利类型

  • 公开/公告日2000-05-18

    原文格式PDF

  • 申请/专利权人 ROBERT BOSCH GMBH;

    申请/专利号DE19991036941

  • 申请日1999-08-05

  • 分类号H01L21/20;H01L31/0392;H01L31/18;

  • 国家 DE

  • 入库时间 2022-08-22 01:42:04

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