Observation apparatus for semiconductors during manufacturing of PCBs has microscopes, plate and manoeuvre panel allowing corresponding displacement of specimens and microscopes

摘要

Observation apparatus (10) comprises reflective optic microscope (14) in housing (12), camera (44) and light source (46) placed on same side of specimen (52 b), supporting means (50), such as rigid arm (54), keeping observation axis (X-X, Y-Y) of microscopes (14, 16) at interval separating two specimens (52 a, b). Apparatus also has plate (28) and manoeuvre panel (28a) allowing displacement between second specimen and first microscope, identical to displacement between first specimen and second microscope, so that both microscopes observe identical and matching areas of specimens. An Independent claim is also included for the microscopic observation method.