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Semiconductor device with refractory metal element
Semiconductor device with refractory metal element
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机译:具有难熔金属元素的半导体器件
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摘要
A semiconductor device includes a self-aligned refractory metal constituent in a recess in a semiconductor substrate and having the same plane pattern as a bottom surface of the recess. The width of the constituent is determined by the plane pattern of the recess and, accordingly, the pattern width of the constituent is easily controlled by the plane pattern of the recess.
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