Method for producing a noble metal-containing structure on a substrate, and semiconductor component having such a noble metal- containing structure

摘要

A method for producing a noble metal-containing structure on a substrate, and a semiconductor component having such a noble metal- containing structure, include introducing a noble metal into a preliminary structure by converting a gaseous compound of the noble metal with a non-noble metal in a preliminary structure into elementary noble metal and a gaseous compound of the non-noble metal. The process continues until a desired amount of the non-noble metal in the preliminary structure is replaced by the noble metal.