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METHOD FOR PRODUCING A NOBLE METAL-CONTAINING STRUCTURE ON A SUBSTRATE, AND SEMICONDUCTOR COMPONENT HAVING SUCH A NOBLE METAL-CONTAINING STRUCTURE
METHOD FOR PRODUCING A NOBLE METAL-CONTAINING STRUCTURE ON A SUBSTRATE, AND SEMICONDUCTOR COMPONENT HAVING SUCH A NOBLE METAL-CONTAINING STRUCTURE
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机译:在基体上制造含金属的结构的方法,以及具有这种含金属的结构的半导体组件
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摘要
A method for producing a noble metal-containing structure on a substrate, and a semiconductor component having such a noble metal-containing structure, include introducing a noble metal into a preliminary structure by converting a gaseous compound of the noble metal with a non-noble metal in a preliminary structure into elementary noble metal and a gaseous compound of the non-noble metal. The process continues until a desired amount of the non-noble metal in the preliminary structure is replaced by the noble metal.
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