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Field-emission cold cathode having improved insulating characteristic and manufacturing method of the same
Field-emission cold cathode having improved insulating characteristic and manufacturing method of the same
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机译:具有改善的绝缘特性的场致冷阴极及其制造方法
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摘要
Piled-up films composed of different materials or composed of the same material manufactured by different methods or different conditions are used as an insulating layer for a field-emission cold cathode. The insulating layer may have a composition which is varied continuously in the thickness direction. A cross-section of the insulating layer may be made uneven. Preferably, a triple junction in which a substrate, the insulating layer, and a vacuum are in contact with one another, is disposed at a position which can not be seen from outside the device.
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