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Plasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable core
Plasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable core
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机译:等离子源,用于产生具有磁导芯的感应耦合的板状等离子体
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摘要
The arrangement comprises an antenna coil disposed close to a cover 4 for a Plasma forming chamber 3 and having one side surface opposed to the chamber space of said plasma forming chamber, a magnetically permeable core 7 of ferromagnetic material whose lower surface opposed to said chamber space is formed with a groove 7a in which the conductor of said antenna coil is received, and a susceptor 16 disposed in the lower region of said chamber space for placing an object to be treated 19 thereon.
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